Correcting device, exposure apparatus, device production...

Details Correcting device, exposure apparatus, device production... Correcting device, exposure apparatus, device production...

2006-11-21

2006-11-21

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

Electrical characteristic sensed

C355S053000, C250S397000, C250S453110

Reexamination Certificate

active

07138282

ABSTRACT:
A correcting device that properly maintains the flatness of a mask, an exposure apparatus in which overlay accuracy is increased by making use of the correcting device, and a device production method. The correcting device includes a gas flow path including a first area and a second area. The first area is formed above a reticle having formed thereon a pattern that is projected onto a material to be processed in order to form an image of the pattern on the material to be processed. The second area is connected to the first area, has a cross-sectional area that is different from that of the first area, and is not disposed in line with the reticle. The correcting device also includes a blowing section that blows gas to the gas flow path.

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