Micro-support structures

Details Micro-support structures Micro-support structures

2006-10-17

2006-10-17

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S222100, C359S223100

Reexamination Certificate

active

07123399

ABSTRACT:
A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.

REFERENCES:
patent: 5886811 (1999-03-01), Min
patent: 6204080 (2001-03-01), Hwang
patent: 6884580 (2005-04-01), Caren et al.
patent: 6919980 (2005-07-01), Miyajima et al.

Affiliated with

Also associated with

Rating

Micro-support structures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-support structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-support structures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3696349