Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate
2006-06-06
2006-06-06
Moore, Margaret G. (Department: 1712)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From silicon reactant having at least one...
C428S447000
Reexamination Certificate
active
07057002
ABSTRACT:
A siloxane-based resin having germanium and an interlayer insulating film for a semiconductor device formed using the same. The siloxane-based resins have a low dielectric constant in addition to excellent mechanical properties so that they are useful materials for an insulating film between interconnecting layers of a semiconductor device.
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Lee Sang Kyun
Seon Jong Baek
Harness Dickey & Pierce PLC
Moore Margaret G.
Samsung Electronics Co.,Ltd.
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