In-wafer testing of integrated optical components in...

Details In-wafer testing of integrated optical components in... In-wafer testing of integrated optical components in...

2006-10-31

2006-10-31

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

Reexamination Certificate

active

07129100

ABSTRACT:
Disclosed is a method of in-wafer testing of integrated optical components and in-wafer chips with photonic integrated circuits (PICs).

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