Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-02-07
2006-02-07
Everhart, Caridad (Department: 2891)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C438S005000, C438S007000
Reexamination Certificate
active
06996449
ABSTRACT:
To reduce a stop time of transportation of wafers which occurs when one stepper handles many kinds of products, before exposure of semiconductor wafers of a first cassette port7ais completed, a process recipe for semiconductor wafers of a second cassette port7bis obtained from a host computer2,the progress of the exposure of the semiconductor wafers of the first cassette port7ais detected via a sequencer5,it is determined, based on the obtained process recipe, whether or not the semiconductor wafers of the second cassette port7bcan be transported to an exposure stage following the last semiconductor wafer of the first cassette port7a, and a stepper1is caused to perform exposure in accordance with the determination result and the progress detection result.
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Asahi Kasei Microsystems Co. Ltd.
Everhart Caridad
Finnegan, Henderson Farabow, Garrett and Dunner L.L.P.
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