Piezoelectric/electrostrictive film-type device

Details Piezoelectric/electrostrictive film-type device Piezoelectric/electrostrictive film-type device

2006-10-24

2006-10-24

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000, C310S365000, C310S366000

Reexamination Certificate

active

07126255

ABSTRACT:
A piezoelectric/electrostrictive film-type device is provided which includes a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode. The lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode are layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more relative to the width of the thin diaphragm portion.

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