Nozzle plate member for supplying fluids in dispersed manner...

Fluid sprinkling – spraying – and diffusing – Rigid fluid confining distributor – Orifice in separable disc or plate

Reexamination Certificate

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Details

C239S548000, C239S589000, C239S600000, C029S890130, C029S890124, C029S890126, C228S135000, C228S138000

Reexamination Certificate

active

07150418

ABSTRACT:
The present invention is directed to a gas supply nozzle plate constructed by laminating a plurality of metal members each having a fluid path and branch. A fluid nozzle plate member provided by the invention has high sealing at a joined part, and high reliability even when used in high vacuum or at a high temperature. The fluid nozzle plate member comprises a plurality of plate-like metal members each having a fluid path and/or a branch. In this case, the plurality of plate-like metal members are laminated, and the laminated surfaces thereof are joined together by press forging.

REFERENCES:
patent: 3668756 (1972-06-01), Wieme
patent: 4768751 (1988-09-01), Giachino et al.
patent: 5334999 (1994-08-01), Kashiwazaki et al.
patent: 5489930 (1996-02-01), Anderson
patent: 5647125 (1997-07-01), Yokoyama
patent: 6110332 (2000-08-01), Swierkowski
patent: 6371357 (2002-04-01), Watanabe
patent: 11-285775 (1999-10-01), None
patent: 2000-005884 (2000-01-01), None

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