Two dimensional scanner for a deep-UV laser beam

Details Two dimensional scanner for a deep-UV laser beam Two dimensional scanner for a deep-UV laser beam

1999-04-25

2000-03-07

Schuberg, Darren E.

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359201, 359359, 359857, 359862, 359872, G02B 2608

Patent

active

060348054

ABSTRACT:
A two-dimensional scanning method and apparatus are disclosed for improving the throughput of a deep-UV laser beam. Only reflection of s polarization is used and the incident angles on both x-y mirrors can be adjusted simultaneously without altering the direction of the output beam.

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patent: 4070089 (1978-01-01), Grafton
patent: 5094523 (1992-03-01), Reznichenko et al.
patent: 5604629 (1997-02-01), Hunter et al.
patent: 5637851 (1997-06-01), Swantz et al.
General Scanning. Inc, Product drawing X43037 Apr. 1986.
Cambridge Technology, Inc, Product drawing XY6850 May 1994.

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