Cryopump with two-stage pulse tube refrigerator

Details Cryopump with two-stage pulse tube refrigerator Cryopump with two-stage pulse tube refrigerator

2006-10-03

2006-10-03

Doerrler, William C. (Department: 3744)

Refrigeration

Gas compression, heat regeneration and expansion, e.g.,...

C062S055500

Reexamination Certificate

active

07114341

ABSTRACT:
Disclosed is a two-stage pulse tube cryopump cooling system in which the pulse tubes and valves are inline, with the hot ends of the pulse tubes at the top and the valve mechanism is at the bottom and the hot ends and buffer volume are cooled by an inline coolant line from the compressor input to the compressor output and attached in heat exchange relationship with the buffer volume.

REFERENCES:
patent: 5443548 (1995-08-01), Saho et al.
patent: 5845498 (1998-12-01), Matsui et al.
patent: 5974807 (1999-11-01), Gao et al.
patent: 6263677 (2001-07-01), Hafner et al.
patent: 6293109 (2001-09-01), Miyamoto
patent: 6467277 (2002-10-01), Okamura et al.
patent: 6813891 (2004-11-01), Heron et al.
patent: 10-184540 (1998-07-01), None

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