Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-11-21
2006-11-21
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603230, C029S603110, C451S028000, C360S122000, C360S123090, C360S125330
Reexamination Certificate
active
07137191
ABSTRACT:
A first insulating layer is formed on a main magnetic pole used as a magnetic pole layer to have a protruding portion and a flat portion formed around the protruding portion. A second insulating layer is formed on the flat portion, and then the protruding portion of the first insulating layer is cut to expose the upper surface of the main magnetic pole and to form the same planarized surface including the upper surfaces of the main magnetic pole and the second insulating layer. Polishing is stopped using the second insulating layer as a marker, thereby permitting precise control of the amount of polishing.
REFERENCES:
patent: 6430003 (2002-08-01), Sasaki
patent: 7-272211 (1995-10-01), None
patent: 11-161915 (1999-06-01), None
patent: 11-232609 (1999-08-01), None
Park et al., “A Sacrificial Layer Approach to Highly Laminated Magnetic Cores”, The 5th IEEE International Conference of Micro Electro Mechanical Systems, Jan. 20-24, 2002, pp. 380-383.
Kobayashi Kiyoshi
Sato Kiyoshi
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