High purity fluid delivery system

Details High purity fluid delivery system High purity fluid delivery system

2006-10-03

2006-10-03

Krishnamurthy, Ramesh (Department: 3753)

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

C137S486000, C222S389000, C222S386500

Reexamination Certificate

active

07114517

ABSTRACT:
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

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