Retainer, exposure apparatus, and device fabrication method

Details Retainer, exposure apparatus, and device fabrication method Retainer, exposure apparatus, and device fabrication method

2006-02-28

2006-02-28

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S818000, C396S529000

Reexamination Certificate

active

07006308

ABSTRACT:
A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

REFERENCES:
patent: 6239924 (2001-05-01), Watson et al.
patent: 6525888 (2003-02-01), Schletterer
patent: 6556364 (2003-04-01), Meehan et al.
patent: 2001-74991 (2001-03-01), None
patent: 2001-284226 (2001-10-01), None

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