Reynolds number correction function for mass flow rate sensor

Measuring and testing – Volume or rate of flow – Proportional

Reexamination Certificate

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C073S204210

Reexamination Certificate

active

07000463

ABSTRACT:
A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.

REFERENCES:
patent: 4524616 (1985-06-01), Drexel et al.
patent: 4951224 (1990-08-01), Hokynar
patent: 5861546 (1999-01-01), Sagi et al.
patent: 6332348 (2001-12-01), Yelverton et al.
Califlow A-250, Calibration&Service, MKS Technology for Productivity.
Molbloc/molbox Gas Flow Standards, DHI Calibration Solutions for Pressure and Flow.

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