Micro mirror unit and method of making the same

Details Micro mirror unit and method of making the same Micro mirror unit and method of making the same

2006-12-05

2006-12-05

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100, C359S224200

Reexamination Certificate

active

07145712

ABSTRACT:
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

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