Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-11-28
2006-11-28
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000
Reexamination Certificate
active
07142284
ABSTRACT:
A position detector for detecting a relative positional relationship between an original form that has a position detecting mark, and a stage that supports the original form and has a reference mark. The position detector includes an illumination optical system for illuminating the position detecting mark or the reference mark using illumination light, a detection optical system for introducing reflection light that is reflected from the position detecting mark or the reference mark, to an image pickup unit, and a controller for varying at least one of a numerical aperture of the detection optical system, a numerical aperture of the illumination optical system and a wavelength of the illumination light to control contrast of a mark signal that is detected by the image pickup unit and indicates the position detecting mark or the reference mark. The relative positional relationship is detected using offsets generated in a predetermined numerical aperture of the detection optical system, a predetermined numerical aperture of the illumination optical system and a predetermined wavelength of the illumination light measured beforehand.
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