Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2006-10-31
2006-10-31
Ha, Nguyen T. (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C361S306100, C361S306200, C361S301400, C361S311000, C361S321200, C257S295000, C257S296000
Reexamination Certificate
active
07130182
ABSTRACT:
The invention relates to a stacked capacitor (10) comprising a silicon base plate (16), a poly-silicon center plate (32) arranged above the base plate (16), a lower gate-oxide dielectric (26) arranged between the base plate (16) and the center plate (32), a cover plate (36) made of a metallic conductor and arranged above the center plate (32), and an upper dielectric (34) arranged between the center plate (32) and the cover plate (36). The cover plate (36) and the base plate (16) are electrically connected to each other and together form a first capacitor electrode. The center plate (32) forms a second capacitor electrode. The invention further relates to an integrated circuit with such a stacked capacitor, as well as to a method for fabrication of a stacked capacitor as part of a CMOS process.
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Balster Scott
Dirnecker Christoph
El-Kareh Badih
Steinmann Philipp
Brady III W. James
Garner Jacqueline J.
Ha Nguyen T.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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