Methods for producing passive components on a semiconductor...

Details Methods for producing passive components on a semiconductor... Methods for producing passive components on a semiconductor...

2006-06-13

2006-06-13

Arbes, Carl J. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S825000, C029S846000, C438S384000

Reexamination Certificate

active

07059041

ABSTRACT:
Methods are specified for producing passive components on a substrate, which methods permit, with a low outlay and a good yield, the production of different components, in particular high-resistance and low-resistance resistor elements and/or capacitor elements having a higher and those having a lower capacitance per unit length on a substrate. In this case, lift-off processes can largely be dispensed with, particularly in the case of critical patternings, and selective dry- and/or wet-chemical etching can be effected.

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