Diagnostic system and operating method for the same

Details Diagnostic system and operating method for the same Diagnostic system and operating method for the same

2006-02-21

2006-02-21

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S026000, C700S050000, C700S080000, C700S121000, C706S008000, C706S009000

Reexamination Certificate

active

07003366

ABSTRACT:
An operating method for a fault detection of a semiconductor process and a diagnostic system for fault detection in a semiconductor process are described. By using the method and the diagnostic system, the real-time process parameters collected during the process is performed by the tool become meaningful and are correlated with the historic process performance data obtained by the post process metrology process. Moreover, the method and the diagnostic system further provide an alarm index for the process performed on the tool to actually reflect the process environment during the process is performed after correlating the real-time process parameters and the historic process performance data. With referring to the alarm index, the current process performance under the real-time process parameters in the tool can be accurately diagnosed.

REFERENCES:
patent: 6110214 (2000-08-01), Klimasauskas
patent: 6557118 (2003-04-01), Schleiss et al.
patent: 6597447 (2003-07-01), Stirton et al.
patent: 6633782 (2003-10-01), Schleiss et al.
patent: 2005/0209981 (2005-09-01), Chen
“Multi-Variable Process Window Based Fuzzy Fault Detection System” By author Hung-Wen Chiou and Tings Wang from Asia AEC/APC Dec. 8, 2004 conference.

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