Apparatus for adjustment of partial coherence of light...

Details Apparatus for adjustment of partial coherence of light... Apparatus for adjustment of partial coherence of light...

2006-11-21

2006-11-21

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

With light limiting or controlling means

C355S067000

Reexamination Certificate

active

07139135

ABSTRACT:
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.

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patent: 6548781 (2003-04-01), Brunwinkel
patent: 0744663 (1996-11-01), None
patent: 10206922 (1998-08-01), None

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