Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2006-11-07
2006-11-07
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
C356S511000
Reexamination Certificate
active
07133139
ABSTRACT:
A differential interferometric confocal microscope for measuring an object, the microscope including a source-side pinhole array; a detector-side pinhole array; and an interferometer that images the array of pinholes of the source-side pinhole array onto a first array of spots located in front of an object plane located near where the object is positioned and onto a second array of spots behind the object plane, wherein the first and second arrays of spots are displaced from each other in both a direction normal to the object plane and a direction parallel to the object plane, the interferometer also imaging the first arrays of spots onto a first image plane that is behind the detector-side pinhole array and imaging the second array of spots onto a second image plane that is in front of the detector-side pinhole array wherein each spot of the imaged first array of spots is aligned with a corresponding different spot of the imaged second array of spots and a corresponding different pinhole of the detector-side pinhole array.
REFERENCES:
patent: 3628027 (1971-12-01), Brauss
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4226501 (1980-10-01), Shafer
patent: 4272684 (1981-06-01), Seachman
patent: 5220403 (1993-06-01), Batchelder
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5327223 (1994-07-01), Korth
patent: 5485317 (1996-01-01), Perissinotto
patent: 5602643 (1997-02-01), Barrett
patent: 5614763 (1997-03-01), Womack
patent: 5633972 (1997-05-01), Walt
patent: 5659420 (1997-08-01), Wakai et al.
patent: 5699201 (1997-12-01), Lee
patent: 5760901 (1998-06-01), Hill
patent: 5828455 (1998-10-01), Smith et al.
patent: 5894195 (1999-04-01), McDermott
patent: 5915048 (1999-06-01), Hill et al.
patent: 6052231 (2000-04-01), Rosenbluth
patent: 6091496 (2000-07-01), Hill
patent: 6330065 (2001-12-01), Hill
patent: 6445453 (2002-09-01), Hill
patent: 6447122 (2002-09-01), Kobayashi et al.
patent: 6480285 (2002-11-01), Hill
patent: 6552805 (2003-04-01), Hill
patent: 6552852 (2003-04-01), Hill
patent: 6597721 (2003-07-01), Hutchinson
patent: 6606159 (2003-08-01), Hill
patent: 6667809 (2003-12-01), Hill
patent: 6714349 (2004-03-01), Nam
patent: 6717736 (2004-04-01), Hill
patent: 6753968 (2004-06-01), Hill
patent: 6775009 (2004-08-01), Hill
patent: 6847029 (2005-01-01), Hill
patent: 2002/0021451 (2002-02-01), Hill
patent: 2002/0033952 (2002-03-01), Hill
patent: 2002/0074493 (2002-06-01), Hill
patent: 2003/0147083 (2003-08-01), Hill
patent: 2004/0201852 (2004-10-01), Hill
patent: 2004/0201853 (2004-10-01), Hill
patent: 2004/0201854 (2004-10-01), Hill
patent: 2004/0201855 (2004-10-01), Hill
patent: 2004/0202426 (2004-10-01), Hill
patent: 2004/0227950 (2004-11-01), Hill
patent: 2004/0227951 (2004-11-01), Hill
patent: 2004/0228008 (2004-11-01), Hill
patent: 2004/0246486 (2004-12-01), Hill
patent: 2004/0257577 (2004-12-01), Hill
U.S. Appl. No. 09/917,402, filed Jul. 27, 2001, Hill.
U.S. Appl. No. 10/765,368, filed Jan. 27, 2004, Hill.
U.S. Appl. No. 60/442,858, filed Jul. 27, 2002, Hill.
U.S. Appl. No. 60/442,982, filed Jan. 29, 2003, Hill.
U.S. Appl. No. 60/444,707, filed Jan. 4, 2003, Hill.
U.S. Appl. No. 60/445,739, filed Feb. 7, 2003, Hill.
U.S. Appl. No. 60/447,254, filed Feb. 13, 2003, Hill.
U.S. Appl. No. 60/459,425, filed Apr. 11, 2003, Hill.
U.S. Appl. No. 60/460,129, filed Apr. 3, 2003, Hill.
Silfvast, W. (1995) “Lasers”,Handbook of Optics, New York:: McGraw-Hill, Ch. 11.
Stoicheff, et al. “Tunable, Coherent Sources for High Resolution VUV and XUV Spectroscopy”,Laser Techniques for Extreme Ultraviolet Spectroscopy, p. 19 (1982).
Harris, et al. “Generation of Ultraviolet and Vacuum Ultraviolet Radiation”Laser Spectroscopy.
Kung, A.H., “Generation of Tunable Picosecond VUV Radiation”Appl. Phys Lett.25, p. 653 (1974).
D'ariano, et al. “Lower Bounds on Phase Sensitivity in Ideal and Feasible Measurements”Phys. Rev. A49, pp. 3022-3036 (1994).
Connolly Patrick
Toatley , Jr. Gregory J.
Wilmer Cutler Pickering Hale and Dorr LLP
Zetetic Institute
LandOfFree
Longitudinal differential interferometric confocal microscopy does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Longitudinal differential interferometric confocal microscopy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Longitudinal differential interferometric confocal microscopy will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3651460