Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-02-14
2006-02-14
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML
Reexamination Certificate
active
06998621
ABSTRACT:
A device for influencing an electron beam, in particular a beam deflector (10), comprises a cylindrical support body (11) with an axial passage (12) through which the beam can propagate and axially spaced sets of coils (14) supported by the body and operable by electrical energy to produce electromagnetic fields for deflection of the beam. The device includes a cooling system for counteracting temperature rise in the body (11) due to operation of the coils (14). The system comprises a pipe (15) of compliant material extending helically around and thermally conductively coupled, preferably adhesively bonded, to the support body (11) and serving to conduct liquid coolant for heat exchange with the body (11) over substantially all the external circumferential surface thereof. The cooling system further includes a pump (16) for conveying the coolant through the pipe (15) in a generally laminar flow so that, in conjunction with the flow path and pipe material, generation of vibrations is largely avoided and any vibrations that are generated are absorbed by the pipe (15) rather than transmitted to the body (11).
REFERENCES:
patent: 4296804 (1981-10-01), Press et al.
patent: 4644217 (1987-02-01), Hoet et al.
patent: 5136166 (1992-08-01), Young
patent: 5629526 (1997-05-01), Nakasuji
patent: 5847399 (1998-12-01), Schmitt et al.
patent: 6053241 (2000-04-01), Kendall
patent: 6486605 (2002-11-01), Beunas et al.
patent: 1098865 (1968-01-01), None
patent: 2 175 134 (1986-11-01), None
Houston Eliseeva LLP
Lee John R.
Leica Microsystems Lithography Ltd.
Vanore David A.
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