Micromirror apparatus with improved in-plane rotation tolerance

Details Micromirror apparatus with improved in-plane rotation tolerance Micromirror apparatus with improved in-plane rotation tolerance

2006-05-02

2006-05-02

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

07038831

ABSTRACT:
A micromirror apparatus is provided with edge portion(s) of the micromirror(s) being tapered to provide a desired micromirror fill ratio and a desired amount of in-plane rotation tolerance.

REFERENCES:
patent: 2002/0136490 (2002-09-01), Zhang et al.
patent: 2005/0018091 (2005-01-01), Patel et al.

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