Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2006-06-20
2006-06-20
Shah, Sanjiv (Department: 2627)
Image analysis
Applications
Manufacturing or product inspection
C250S201200, C250S559410, C356S237100, C356S239800, C356S614000, C382S144000
Reexamination Certificate
active
07065240
ABSTRACT:
A reticle inspection apparatus for detecting defects on a reticle16includes an image data generator42for generating image data of the reticle16, a definition analyzer44for analyzing definition of image from the image data, a definition judge device45for judging whether or not the definition of image is within a predetermined reference range and a sensor position regulating stage34for correcting a position of a position sensor33when the definition of image is out of the reference range. The reticle inspection apparatus constructed as mentioned is reliable and capable of automatically diagnosing an error of an auto-focusing function of the reticle inspection apparatus due to deformation, etc., of the reticle inspection apparatus.
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Copy of Japanese Office Action dated Jul. 20, 2004 (and English translation of relevant portion).
Desire Gregory
Dickstein Shapiro Morin & Oshinsky LLP.
NEC Corporation
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