Differential numerical aperture methods

Details Differential numerical aperture methods Differential numerical aperture methods

2006-05-30

2006-05-30

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Methods

C356S369000

Reexamination Certificate

active

07053991

ABSTRACT:
Methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scatterometer, ellipsometer and similar analysis methods, including bi-directional reflectance or transmission distribution function measurement.

REFERENCES:
patent: 3814943 (1974-06-01), Baker et al.
patent: 3927253 (1975-12-01), Jungles et al.
patent: 4710642 (1987-12-01), McNeil
patent: 4931830 (1990-06-01), Suwa et al.
patent: 5164790 (1992-11-01), McNeil et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5218415 (1993-06-01), Kawashima
patent: 5241369 (1993-08-01), McNeil et al.
patent: 5450201 (1995-09-01), Katzir et al.
patent: 5561525 (1996-10-01), Toyonaga et al.
patent: 5596411 (1997-01-01), Fanton et al.
patent: 5638353 (1997-06-01), Takahashi
patent: 5703692 (1997-12-01), McNeil et al.
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 5867276 (1999-02-01), McNeil et al.
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 5880838 (1999-03-01), Marx et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 5912741 (1999-06-01), Carter et al.
patent: 5955739 (1999-09-01), Kawashima
patent: 6034776 (2000-03-01), Germer et al.
patent: 6037579 (2000-03-01), Chan et al.
patent: 6052188 (2000-04-01), Fluckiger et al.
patent: 6100985 (2000-08-01), Scheiner et al.
patent: 6122046 (2000-09-01), Almogy
patent: 6130750 (2000-10-01), Ausschnitt et al.
patent: 6134012 (2000-10-01), Aspnes et al.
patent: 6281974 (2001-08-01), Scheiner et al.
patent: 6750968 (2004-06-01), Sandusky
patent: 2003/0025909 (2003-02-01), Hallstadius
patent: 06-504845 (1994-02-01), None
patent: 09-105605 (1995-10-01), None
patent: 08-327318 (1996-12-01), None
patent: 11-211421 (1999-08-01), None

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