Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-10-10
2006-10-10
Evans, Geoffrey S. (Department: 1725)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S067000
Reexamination Certificate
active
07119878
ABSTRACT:
An exposure apparatus for exposing a substrate to a pattern of a mask by use of exposure light. The apparatus includes an optical system for directing the exposure light from a light source to the substrate, the optical system having an optical element, a first casing for accommodating therein an optical surface of the optical element, and a second casing for accommodating therein the optical element and the first casing, a first port provided in the first casing, a second port provided in the second casing, a supplier for supplying an inert gas into the first casing and the second casing, and a supplier for supplying an inert gas into the first casing and the second casing through the first port and the second port.
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Hase Tomoharu
Yamane Yukio
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