Testing device and testing method of a semiconductor device

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S757020, C324S765010

Reexamination Certificate

active

07129726

ABSTRACT:
A testing device can perform a test on an arbitrary one of a plurality of semiconductor devices by pressing the semiconductor devices onto a contactor from a back side of the semiconductor device. A test circuit board has a contactor provided with contact pieces corresponding to external connection terminals of semiconductor devices to be tested. A support board is capable of mounting the semiconductor devices thereon in an aligned state. A stage supports the support board. A press head presses the semiconductor devices to be tested mounted on the support board so as to cause external connection terminals of the semiconductor devices to be tested to contact with the contact pieces of the contactor. The stage is movable to a position at which at least one of the semiconductor devices to be tested, which are mounted on the support board, faces the contactor.

REFERENCES:
patent: 5192908 (1993-03-01), Shibata
patent: 5489853 (1996-02-01), Nakajima
patent: 6111421 (2000-08-01), Takahashi et al.
patent: 6433563 (2002-08-01), Maruyama
patent: 6838868 (2005-01-01), Bosy
patent: 63-114233 (1988-05-01), None
patent: 1-147382 (1989-06-01), None
patent: 2003-66109 (2003-03-01), None

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