Manufacturing method of magnetoresistive effect sensor

Details Manufacturing method of magnetoresistive effect sensor Manufacturing method of magnetoresistive effect sensor

2006-08-08

2006-08-08

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603070, C029S603090, C029S603130, C216S022000, C216S038000, C216S078000, C360S324110, C360S324120, C427S127000, C427S128000, C427S129000, C427S130000, C427S131000

Reexamination Certificate

active

07086141

ABSTRACT:
A manufacturing method of an MR sensor including a step of stacking an anti-ferromagnetic layer made of an electrically conductive anti-ferromagnetic material, a step of stacking a pinned layer on the anti-ferromagnetic layer, a step of stacking a nonmagnetic spacer layer on the pinned layer, a step of exposing at least once a surface of the nonmagnetic spacer layer to an oxygen-contained atmosphere, a step of stacking a free layer on the nonmagnetic spacer layer, a magnetization direction of the free layer being free depending upon a magnetic filed applied thereto, and a step of providing the pinned layer a magnetization direction fixed by an exchange coupling between the anti-ferromagnetic layer and the pinned layer.

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