Temperature gauge and ceramic susceptor in which it is utilized

Details Temperature gauge and ceramic susceptor in which it is utilized Temperature gauge and ceramic susceptor in which it is utilized

2006-08-15

2006-08-15

Gutierrez, Diego (Department: 2859)

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

C374S208000, C374S141000

Reexamination Certificate

active

07090394

ABSTRACT:
Temperature gauge, and ceramic susceptors and semiconductor manufacturing equipment utilizing the temperature gauge, in which the thermocouple may be easily replaced even if damaged, and in which heat from the temperature-gauging site is readily transmitted to the temperature-gauging contact, shortening time until the measurement temperature stabilizes. A temperature-gauging contact (12) in the tip of the thermocouple contacts, in an exposed-as-it-is state, a temperature-gauging site on a ceramic susceptor (1), and by means of a circular cylindrical-shaped retaining member (11) screwed into female threads in the ceramic susceptor (1) is detachably pressed upon and retained against the ceramic susceptor. Thermocouple lead lines (13), passing through a through-hole (14) in the retaining member (11), stretch from one end face to the other end face thereof. The retaining member may be provided with a flange having threaded holes and screwlocked into female screws in the ceramic susceptor.

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