Optical materials in packaging micromirror devices

Details Optical materials in packaging micromirror devices Optical materials in packaging micromirror devices

2006-02-21

2006-02-21

Mack, Ricky L. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S295000, C359S297000, C359S302000

Reexamination Certificate

active

07002727

ABSTRACT:
A method for packaging micromirror array devices is disclosed herein. The method enhances illumination on micromirror array devices by applying a selected optical material between a package lid and glass substrate of the micromirror array device, the selected optical material having a refraction index that matches the refraction indices of the package lid and the glass substrate.

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patent: 2004/0012838 (2004-01-01), Huibers
patent: 2004/0142544 (2004-07-01), Kimura et al.

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