Sensor and electrode extraction structure and method

Details Sensor and electrode extraction structure and method Sensor and electrode extraction structure and method

2006-05-23

2006-05-23

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07047815

ABSTRACT:
A sensor includes a sensor main body, first and second electrodes, an electrode extraction hole, and an interconnection member. A cavity is formed in the sensor main body by joining the outer peripheral portions of the first and second substrates made of an insulating material. The first and second electrodes are formed on the inner surfaces of the first and second substrates which face each other through the cavity. The electrode extraction hole is formed through the first substrate in correspondence with the second electrode. The interconnection member guides the second electrode outside the first substrate through the cavity and the electrode extraction hole. The interconnection member is formed by thermal spraying of metal powder into the cavity from outside the sensor main body through the electrode extraction hole. An electrode extraction structure and electrode extraction method are also disclosed.

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patent: 06-160420 (1994-06-01), None
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