Compact ion gauge using micromachining and MISOC devices

Details Compact ion gauge using micromachining and MISOC devices Compact ion gauge using micromachining and MISOC devices

2006-06-06

2006-06-06

Wells, Nikita (Department: 2881)

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

C250S281000, C250S427000, C250S299000

Reexamination Certificate

active

07057170

ABSTRACT:
A solid state compact ion gauge includes an electron source, a gate electrode, an electron collector, a gas ionizer, an ion anode, and a detector all formed within a cavity of a semiconductor substrate formed of two halves bonded together and having open sides for receiving a gase sample. A sample of gas having multiple gas constituents flows into the cavity from the side where gas molecules collide with electrons flowing from the source to the collector forming ions. The ions are forced under an electric field to the detector which includes a set of detectors for sensing the constituent ions.

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