Abrading – Machine – Rotary tool
Reexamination Certificate
2006-11-28
2006-11-28
Rachuba, M. (Department: 3723)
Abrading
Machine
Rotary tool
C451S526000, C451S528000, C451S529000
Reexamination Certificate
active
07140955
ABSTRACT:
A polishing apparatus includes a plurality of polishing fluid supply openings terminating in a polishing surface of a polishing table, and a plurality of grooves which are formed in the polishing surface and arranged so as not to be in direct communication with the polishing fluid supply openings. The polishing apparatus further includes a polishing fluid supply system for supplying a polishing fluid to a surface of a substrate through the openings. The grooves may extend at right angles relative to one another so as to define a plurality of lands therebetween, and the polishing fluid supply openings are formed through the lands.
REFERENCES:
patent: 5076024 (1991-12-01), Akagawa et al.
patent: 5725420 (1998-03-01), Torii
patent: 5876271 (1999-03-01), Oliver
patent: 5888121 (1999-03-01), Kirchner et al.
patent: 6056851 (2000-05-01), Hsieh et al.
patent: 6062964 (2000-05-01), Chen et al.
patent: 6159088 (2000-12-01), Nakajima
patent: 6196907 (2001-03-01), Kahn
patent: 6241596 (2001-06-01), Osterheld et al.
patent: 6273806 (2001-08-01), Bennett et al.
patent: 6413388 (2002-07-01), Uzoh et al.
patent: 6428405 (2002-08-01), Tsuchiya
patent: 6572445 (2003-06-01), Laursen
patent: 6641462 (2003-11-01), Eaton
patent: 2003/0092363 (2003-05-01), Laursen et al.
Ebara Corporation
Rachuba M.
Wenderoth , Lind & Ponack, L.L.P.
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