MEMS device for an adaptive optics mirror

Details MEMS device for an adaptive optics mirror MEMS device for an adaptive optics mirror

2006-08-29

2006-08-29

Schwartz, Jordan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S245000, C359S872000

Reexamination Certificate

active

07099063

ABSTRACT:
A MEMS device having a movable mirror pixel supported on a substrate and coupled to a motion actuator so as to enable rotation of the mirror pixel about an axis lying within the mirror plane. In one embodiment, the motion actuator has a movable electrode, on which the mirror pixel is mounted. The movable electrode is supported on the substrate by a pair of upright springs, each having two parallel segments joined at one end and disjoint at the other end. One disjoint segment end is coupled to the substrate, while the other disjoint segment end is coupled to the movable electrode. The end of the upright spring corresponding to the joined segment ends points away from the substrate such that (i) the spring body protrudes through a narrow slot in the mirror pixel and (ii) the mirror plane lies at about the mid-point of the spring.

REFERENCES:
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5745278 (1998-04-01), La Fiandra
patent: 6201631 (2001-03-01), Greywall
patent: 6283601 (2001-09-01), Hagelin et al.
patent: 6384952 (2002-05-01), Clark et al.
patent: 6497141 (2002-12-01), Turner et al.
patent: 6771001 (2004-08-01), Mao et al.
patent: 6838738 (2005-01-01), Costello et al.
patent: 6845670 (2005-01-01), McNeil et al.
patent: 6983924 (2006-01-01), Howell et al.
patent: 2005/0120553 (2005-06-01), Brown et al.

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