Micro electromechanical systems thermal switch

Details Micro electromechanical systems thermal switch Micro electromechanical systems thermal switch

2006-04-25

2006-04-25

Wojciechowicz, Edward (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Temperature

C257S254000

Reexamination Certificate

active

07034375

ABSTRACT:
A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.

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patent: 5796152 (1998-08-01), Carr et al.
patent: 2003/0034870 (2003-02-01), Becka et al.
Ionesca, A.M. et al., Modeling and Design of a Low-Voltage SOI Supended-Gate MOSFET (SG-MOSFET) with a Megal-Over-Gate Architecture, International Symposium on Quality Electronic Design, Mar. 18, 2002, pp. 496-501, Los Alamitos, CA.
Fritschi R. et al., A Novel RF MEMS Technological Platform, Annual Conference of the IEEE Industrial Electronics Society, Nov. 5, 2002, pp. 3052-3056, New York, NY.

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