Probe mark reading device and probe mark reading method

Details Probe mark reading device and probe mark reading method Probe mark reading device and probe mark reading method

2006-04-11

2006-04-11

Lee, Hwa (Andrew) (Department: 2877)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C382S145000

Reexamination Certificate

active

07026832

ABSTRACT:
A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

REFERENCES:
patent: 4943767 (1990-07-01), Yokota
patent: 5355081 (1994-10-01), Nakata et al.
patent: 5410259 (1995-04-01), Fujihara et al.
patent: 5585738 (1996-12-01), Kuji et al.
patent: 5642432 (1997-06-01), Mori
patent: 5644245 (1997-07-01), Saitoh et al.
patent: 5808744 (1998-09-01), Moriya
patent: 6096567 (2000-08-01), Kaplan et al.
patent: 6384898 (2002-05-01), Inoue et al.
patent: 6777968 (2004-08-01), Kobayashi et al.
patent: 5-3230 (1993-01-01), None
patent: 9-222311 (1997-08-01), None
patent: 10-223521 (1998-08-01), None
patent: 10-281729 (1998-10-01), None
patent: 11-326233 (1999-11-01), None

Affiliated with

Also associated with

Rating

Probe mark reading device and probe mark reading method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probe mark reading device and probe mark reading method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe mark reading device and probe mark reading method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3619034