Optical waveguide and fabricating method thereof

Optical waveguides – Planar optical waveguide – Thin film optical waveguide

Reexamination Certificate

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C385S042000

Reexamination Certificate

active

07103252

ABSTRACT:
An optical waveguide used in a WDM optical transmission system are fabricated by the following steps in order to be highly integrated and reduced in size and to have a more preferable design. Namely, a first cladding and a first core are formed on a substrate; at least the first core is etched so as to remain a first waveguiding part for guiding light and non-waveguiding parts, disposed on the both sides of the waveguiding part along a guiding direction of the guiding of light, for guiding no light and in such a manner that two grooves, having varying widths in the guiding direction respectively, are formed between the waveguiding part and each of the non-waveguiding parts; a second cladding is deposited on the remaining first core and the fist cladding; and the second cladding is reflowed by a heat treatment so as to be flattened.

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Translation of JP 06110091 A, Suzuki et al., Apr. 22, 1994.

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