Illumination optical system and exposure apparatus having...

Details Illumination optical system and exposure apparatus having... Illumination optical system and exposure apparatus having...

2006-10-24

2006-10-24

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000

Reexamination Certificate

active

07126673

ABSTRACT:
An illumination optical system for illuminating a target surface using light from a light source, includes a sensor for detecting a light intensity of the light, a light splitter for splitting part of the light, and an optical element, arranged between the light source and the light splitter, for transmitting the light, and for reflecting the part of the light that has been split by the light splitter, towards the sensor.

REFERENCES:
patent: 5677754 (1997-10-01), Makinouchi
patent: 6337734 (2002-01-01), Mori
patent: 6339471 (2002-01-01), Morita
patent: 6573977 (2003-06-01), Mori
patent: 6930758 (2005-08-01), Schuster et al.
patent: 10-303114 (1998-11-01), None
patent: 2000-277413 (2000-10-01), None
patent: 2000-394480 (2000-10-01), None

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