Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-08-29
2006-08-29
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C250S492200
Reexamination Certificate
active
07098991
ABSTRACT:
According to one embodiment of the invention, a pattern of a mask is transferred onto a substrate via a projection optical system using an energy beam by placing a substrate on side of an energy beam emitting end portion of projection optical system, when the substrate is exposed, and placing an object on the side of the energy beam emitting end portion of the projection optical system in place of the substrate when the substrate is exchanged. This can adequately remove a light absorptive substance from the region near an output end of the projection optical system and can maintain the gas state even at a time of moving or replacing the substrate.
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Aoki Takashi
Nagasaka Hiroyuki
Nikon Corporation
Oliff & Berridg,e PLC
Rutledge D.
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