Position detection apparatus, position detection method,...

Details Position detection apparatus, position detection method,... Position detection apparatus, position detection method,...

2006-05-23

2006-05-23

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S491100, C250S492200

Reexamination Certificate

active

07049608

ABSTRACT:
A position detection apparatus detecting a position of a mark similar to a template image from an input image has a calculation block. The calculation block includes phase difference calculation means and mark position detection means. The phase difference calculation means calculates a phase difference between a phase component of each frequency component when the template image is transformed into frequency components and a phase component for each frequency component when an input image is transformed into frequency components with a reference point being set at a predetermined position on the input image. The phase component difference calculated by the phase difference calculation means is transformed into a phase impulse response function, according to which the mark position detection means detects the position of the mark on the input image.

REFERENCES:
patent: 2001/0024278 (2001-09-01), Yoshida
patent: 5-159056 (1993-06-01), None
patent: 10-134184 (1998-05-01), None

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