Position measuring device, position measurement method,...

Details Position measuring device, position measurement method,... Position measuring device, position measurement method,...

2006-09-12

2006-09-12

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S614000, C700S125000, C702S150000

Reexamination Certificate

active

07106444

ABSTRACT:
This position measuring device comprising a calculation unit19calculates mark position information relating to the position of the mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object W, and a correction device19for correcting the calculation results from the calculation unit19based on the asymmetry of the mark signal.As a result, positional deviation resulting from asymmetry can be detected, and by correcting for this deviation the effect that the image asymmetry has on the measurement can be reduced. Therefore, a more accurate high precision alignment can be performed, and there is no requirement to increase the NA of the detection optical system, nor to prepare a special short wavelength light source, meaning increases in the size and cost of the apparatus can also be prevented.

REFERENCES:
patent: 4531060 (1985-07-01), Suwa et al.
patent: 4860374 (1989-08-01), Murakami et al.
patent: 4955062 (1990-09-01), Terui
patent: 5094539 (1992-03-01), Komoriya et al.
patent: 5109430 (1992-04-01), Nishihara et al.
patent: 5418613 (1995-05-01), Matsutani
patent: 5502311 (1996-03-01), Imai et al.
patent: 5525808 (1996-06-01), Irie et al.
patent: 5543921 (1996-08-01), Uzawa et al.
patent: 5594549 (1997-01-01), Mori et al.
patent: 6023338 (2000-02-01), Bareket
patent: 6034378 (2000-03-01), Shiraishi
patent: 6242754 (2001-06-01), Shiraishi
patent: 6677601 (2004-01-01), Shiraishi
patent: U 60-130742 (1985-09-01), None
patent: A 61-208220 (1986-09-01), None
patent: A 61-215905 (1986-09-01), None
patent: A 63-298102 (1988-12-01), None
patent: A 1-227431 (1989-09-01), None
patent: A 1-243445 (1989-09-01), None
patent: A 2-7511 (1990-01-01), None
patent: A 2-105002 (1990-04-01), None
patent: A 2-119116 (1990-05-01), None
patent: A 2-192113 (1990-07-01), None
patent: A 3-270122 (1991-12-01), None
patent: U 4-65603 (1992-06-01), None
patent: A 4-186717 (1992-07-01), None
patent: A 7-167614 (1995-07-01), None
patent: A 2000-91204 (2000-03-01), None
patent: 130773 (1990-05-01), None
patent: 130778 (1994-06-01), None

Affiliated with

Also associated with

Rating

Position measuring device, position measurement method,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position measuring device, position measurement method,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position measuring device, position measurement method,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3612281