Pumps – Motor driven – Motor within rotary pumping member
Patent
1987-03-03
1988-11-29
Garrett, Robert E.
Pumps
Motor driven
Motor within rotary pumping member
4174234, 415 90, 415170R, F04B 1700, F04D 2904
Patent
active
047878290
ABSTRACT:
A turbomolecular pump is disclosed which has reduced axial length so as to provide a small-sized pump, and which also has improved stability during high-speed operation, is simple in construction, and is able to operate at much higher speeds than prior art devices. The turbomolecular pump comprises: a cylindrical housing having a plurality of stator vanes provided on the inner peripheral surface thereof, the cylindrical housing having inlet ports and an outlet port; a rotary shaft rotatably supported on the cylindrical casing through bearings; a rotary member fixedly mounted on the rotary shaft and having a plurality of rotor vanes provided on the radially outer peripheral surface thereof, the rotor vanes being interlaced with the stator vanes in a face-to-face relation with each other so that during rotation of the rotor, the rotor and stator vanes cooperate with each other to produce a undirectional flow of a fluid from the inlet ports toward the outlet port; and an electric motor disposed in the cylindrical housing for electromagnetically driving the rotary member to rotate relative to the housing, the motor including a rotor mounted on the rotary member and a stator mounted on the housing in an axially spaced face-to-face relation with the rotor.
REFERENCES:
patent: 3168977 (1965-02-01), Garnier et al.
patent: 3399827 (1968-09-01), Schwartzman
patent: 4057369 (1977-11-01), Isenberg et al.
patent: 4111595 (1978-09-01), Becker et al.
patent: 4116592 (1978-09-01), Cherny et al.
Itaya Yoshiyuki
Kitora Yoshihisa
Miyazaki Masayuki
Sekiya Shin
Taketoh Kiyoshi
Garrett Robert E.
Mitsubishi Denki & Kabushiki Kaisha
Pitko Joseph M.
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