Surface inspection system

Details Surface inspection system Surface inspection system

2006-05-16

2006-05-16

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400

Reexamination Certificate

active

07046353

ABSTRACT:
A surface inspection system for projecting a laser beam to a surface of a substrate and for detecting a foreign object by detecting scattered reflection light of the laser beam, comprising a light source unit having a plurality of light emitting sources for emitting the laser beams, and a projecting optical system for projecting the laser beam from each of the light emitting sources to the surface of the substrate.

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