Etching a substrate: processes – Forming or treating electrical conductor article
Reexamination Certificate
2006-04-25
2006-04-25
Vinh, Lan (Department: 1765)
Etching a substrate: processes
Forming or treating electrical conductor article
C216S041000, C216S042000, C216S043000, C438S706000, C438S725000
Reexamination Certificate
active
07033516
ABSTRACT:
A method and system for fabricating an array of electronic devices, typically a display or sensor is described. In the method, a droplet source ejects droplets of a masking material for deposit on a thin film or substrate surface to mask an element of the array of electronic devices. The temperature of the thin-film or substrate surface is controlled such that the droplets rapidly freeze upon contact with the thin-film or substrate surface. The thin-film or substrate is then etched. After etching the masking material is removed.
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Matusiak Robert
Street Robert A.
White Stephen D.
Wong William S.
Chen Kent
Vinh Lan
Xerox Corporation
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