Inertial sensor

Details Inertial sensor Inertial sensor

2006-03-28

2006-03-28

Friedhofer, Michael A. (Department: 2832)

Electricity: circuit makers and breakers

Special application

Change of inclination or of rate of motion responsive

C073S514360

Reexamination Certificate

active

07019231

ABSTRACT:
An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight stopper being arranged in a vicinity of the weight with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.

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