Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-01-17
2006-01-17
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S332000
Reexamination Certificate
active
06987349
ABSTRACT:
The present invention provides a piezoelectric thin film element with superior piezoelectric properties in which the condition of the crystal of the piezoelectric thin film is appropriately controlled, and a manufacturing method thereof, as well as a inkjet recording head, inkjet printer, or other liquid ejecting apparatus employing the same. The piezoelectric thin film element40comprises a top electrode44, a bottom electrode42, and a piezoelectric thin film43formed between the top electrode44and the bottom electrode42, wherein the piezoelectric thin film43is structured so as to comprise a first layer431located nearest to the bottom electrode and second layers (433–436) that are located nearer to the top electrode than the first layer and that have thicknesses greater than that of the first layer431.
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Budd Mark
Seiko Epson Corporation
Sterne Kessler Goldstein & Fox P.L.L.C.
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