Method and apparatus to measure fiber optic pickup errors in...

Details Method and apparatus to measure fiber optic pickup errors in... Method and apparatus to measure fiber optic pickup errors in...

2006-04-18

2006-04-18

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S482000

Reexamination Certificate

active

07030994

ABSTRACT:
Methods and apparatus for characterizing and compensating non-cyclic errors in fiber optic pickups in interferometry systems are disclosed.

REFERENCES:
patent: 4606638 (1986-08-01), Sommargren
patent: 4662750 (1987-05-01), Barger
patent: 4711573 (1987-12-01), Wijntjes et al.
patent: 4790651 (1988-12-01), Brown et al.
patent: 4802765 (1989-02-01), Young et al.
patent: 4859066 (1989-08-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 5064289 (1991-11-01), Bockman
patent: 5114234 (1992-05-01), Otsuka et al.
patent: 5151749 (1992-09-01), Tanimoto et al.
patent: 5187543 (1993-02-01), Ebert
patent: 5331400 (1994-07-01), Wilkening et al.
patent: 5408318 (1995-04-01), Slater
patent: 5491550 (1996-02-01), Dabbs
patent: 5663793 (1997-09-01), de Groot
patent: 5724136 (1998-03-01), Zanoni
patent: 5757160 (1998-05-01), Kreuzer
patent: 5764361 (1998-06-01), Kato et al.
patent: 5781277 (1998-07-01), Iwamoto
patent: 5790253 (1998-08-01), Kamiya
patent: 5801832 (1998-09-01), Van Den Brink
patent: 5951482 (1999-09-01), Winston et al.
patent: 6008902 (1999-12-01), Rinn
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6040096 (2000-03-01), Kakizaki
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6134007 (2000-10-01), Naraki et al.
patent: 6137574 (2000-10-01), Hill
patent: 6157660 (2000-12-01), Hill
patent: 6181420 (2001-01-01), Badami et al.
patent: 6201609 (2001-03-01), Hill et al.
patent: 6208424 (2001-03-01), de Groot
patent: 6236507 (2001-05-01), Hill et al.
patent: 6246481 (2001-06-01), Hill
patent: 6252667 (2001-06-01), Hill et al.
patent: 6252668 (2001-06-01), Hill
patent: 6271922 (2001-08-01), Bülow et al.
patent: 6271923 (2001-08-01), Hill
patent: 6304318 (2001-10-01), Matsumoto
patent: 6313918 (2001-11-01), Hill et al.
patent: 6330105 (2001-12-01), Rozelle et al.
patent: 6541759 (2003-04-01), Hill
patent: 6738143 (2004-05-01), Chu
patent: 2001/0035959 (2001-11-01), Hill
patent: 2002/0048026 (2002-04-01), Isshiki et al.
patent: 2002/0089671 (2002-07-01), Hill
patent: 2003/0090675 (2003-05-01), Fujiwara
patent: 7-351078 (1995-12-01), None
patent: 8-117083 (1996-04-01), None
patent: 10-260009 (1998-09-01), None
Bennett, S.J. . “A Double-Passed Michelson Interferometer.” Optics Communications, 4:6, pp. 428-430, 1972.
Wu et al. “Analytical modeling of the periodic nonlinearity in heterodyne interferometry.” Applied Optics, 37:28, pp. 6696-6700, 1998.
Hines et al. Sub-Nonometer Laser Metrology—Some Techniques and Models. ESO Conference on High-Resolution Imaging by Interferometry II, pp. 1195-1204, 1991.
Bobroff, Norman. “Recent advances in displacement measuring interferometry.” Meas. Sci. Technol. 4, pp. 907-926, 1993.
Oka et al. “Polarization heterodyne interferometry using another local oscillator beam.” Optics Communications, 92, pp. 1-5, 1992.
Mauer, Paul. “Phase Compensation of Total Internal Reflection.” J. Opt. Soc. Am., 56:9, pp. 1219-1221, 1966/.
Player, M.A. “Polarization properties of a cube-corner reflector.” J. Mod. Opt., 35:11, pp. 1813-1820, 1988.
Badami et al. “Investigation of NonLinearity in High Accuracy Heterodyne Laser Interferometry.” American Society for Precision Engineering, 1997 Proceedings, 16, pp. 153-156, 1997.
Bobroff, Norman. “Residual errors in laser interferometry from air turbulence and nonlinearity.” Applied Optics, 26:13, pp. 2676-2686, 1987.

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