Systems for supporting ceramic susceptors

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

Reexamination Certificate

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C219S405000, C219S411000, C219S444100, C219S443100, C219S446100, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

07022947

ABSTRACT:
A support structure for supporting a ceramic susceptor in a chamber is provided. The support structure includes a supporting portion joined with a back face of the ceramic susceptor. The supporting portion includes an inner space that is separated from the atmosphere of the chamber. A cooling system is provided below the supporting portion 6. At least one thermal control portion is provided between the cooling system and the supporting portion for reducing thermal conduction from the susceptor to the cooling system.

REFERENCES:
patent: 6261708 (2001-07-01), Ohashi et al.
patent: 6705394 (2004-03-01), Moslehi et al.
patent: 05-326112 (1993-12-01), None
patent: 2001-250858 (2001-09-01), None
U.S. Appl. No. 11/064,406, filed Feb. 23, 2005, Goto et al.

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