Retroreflector coating for an interferometer

Details Retroreflector coating for an interferometer Retroreflector coating for an interferometer

2006-03-07

2006-03-07

Connolly, Patrick J. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C359S490020

Reexamination Certificate

active

07009711

ABSTRACT:
A corner cube retroreflector having a coating including one or more layers at each reflecting surface. The coating causes the retroreflector to have polarization eigenstates that are substantially linear and to have the properties of a half-wave plate. The coated retroreflector can be used in interferometry and microlithography system.

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patent: 5801832 (1998-09-01), Van Den Brink
patent: 6198574 (2001-03-01), Hill
patent: 2 070 276 (1981-09-01), None
Paul Mauer, “Phase Compensation of Total Internal Reflection”, Journal of the Optical Socient of America, vol. 56, No. 9, pp. 1219-1221 (Sep. 1966).
M.A. Player, “Polarization properties of a cube-corner reflector”, Journal of Modern Optics, vol. 35, No. 11, pp. 1813-1820 (1988).
Paul Mauer, “Phase Compensation of Total Internal Reflection”,Journal of the Optical Society of America, vol. 56, No. 9, pp. 1219-1221 (Sep., 1966).
M.A. Player, “Polarization properties of a cube-corner reflector”,Journal of Modern Optics, vol. 35, No. 11, pp. 1813-1820 (1988).
Chien-Ming Wu, et al., “Analytical modeling of the periodic nonlinearity in heterodyne interferometry”,Applied Optics, vol. 37, No. 28, pp. 6696-6700 (Oct. 1, 1998).

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