System for producing ultrapure water

Liquid purification or separation – Structural installation – Closed circulating system

Reexamination Certificate

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Details

C210S202000, C210S206000, C210S259000, C210S266000, C210S748080, C210S900000

Reexamination Certificate

active

07018529

ABSTRACT:
The ultrapure water producing system produces ultrapure water with high purity and remarkably low content of metals even just after restart of operation thereof. Water sent through the pump3or4into a line8flows through a heat exchanger10, a line12, a UV oxidation apparatus20, a line22, an ion exchange device30, a line32and a membrane filtering device40and is treated in each device in this order to be ultrapure water. The devices10, 20, 30, 40have bypass lines11, 21, 31, 41, respectively. In the sterilizing process, bactericide water is fed only to the membrane filtering device40via the bypass lines11, 21and31. In the following sterilizing process of the heat exchanger10and the UV oxidation apparatus20, the bactericide water flows the line41bypassing around the membrane filtering device40.

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patent: 5512178 (1996-04-01), Dempo
patent: 6416668 (2002-07-01), Al-Samadi
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patent: 6679988 (2004-01-01), Gsell
patent: 2002/0158014 (2002-10-01), Yamasaki et al.
patent: 2003/0044335 (2003-03-01), Jangbarwala
patent: 6-71269 (1994-03-01), None
patent: 6-312175 (1994-11-01), None
patent: 2003-71444 (2003-03-01), None
patent: 3480458 (2003-10-01), None

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