Work holders – Work-underlying support – Support mounting means
Reexamination Certificate
2006-07-04
2006-07-04
Wilson, Lee D. (Department: 3723)
Work holders
Work-underlying support
Support mounting means
C269S2890MR
Reexamination Certificate
active
07070178
ABSTRACT:
A holder is disclosed for a cassette for substrates. The holder includes a base plate on which a guide member provided with at least two guides is secured. The cassette is to be positioned between the guides, which enable the cassette to be aligned with respect to the base plate, and the side of which facing the base plate tapers inwards and downwards. The application of such a holder in an apparatus for manufacturing semiconductor devices is still hampered as a result of incorrectly positioning the holder in the apparatus. This can lead to damage to the substrates and a lower yield of the manufacturing process. The side of the guide member tapers inwards and upwards. By virtue of this structure, the cassette can be positioned more accurately and reproducibly into the holder. In this way, damage to substrates is avoided and the yield is high. The guide member may be mirror symmetrical and can include two separate guide members, which are mirror symmetrical as well. As a result, the holder can be mounted, adjusted and manufactured in a simple and inexpensive manner.
REFERENCES:
patent: 3578799 (1971-05-01), Davis
patent: 3608886 (1971-09-01), Greene
patent: 3626600 (1971-12-01), Gaither
patent: 4732373 (1988-03-01), Yang
patent: 5060920 (1991-10-01), Engibarov
patent: 5074536 (1991-12-01), McConkey
patent: 5206627 (1993-04-01), Kato
patent: 5246218 (1993-09-01), Yap et al.
patent: 5386654 (1995-02-01), Kroenke
patent: 6152435 (2000-11-01), Snell
patent: 6383890 (2002-05-01), Takisawa et al.
patent: 6884639 (2005-04-01), Dougan et al.
patent: 2002/0008345 (2002-01-01), Van Der Toorn
Koninklijke Philips Electronics , N.V.
Wilson Lee D.
Zawilski Peter
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